半导体电子Semiconductor
12英寸晶圆制造基地动力站高精度低氮热能系统 Ultra-Low NOx Precision Thermal System for 12-inch Fab
配置5台富尔顿大型FBD热水锅炉(46.2MW),分阶段原位低氮改造,NOx≤30mg/Nm³,保障晶圆产线连续受控运行。 Five large Fulton FBD boilers (46.2 MW) underwent phased in-situ low-NOx retrofits (NOx <= 30 mg/Nm3), safeguarding continuous wafer fab operations.